Ebara turbo pumps
Trotec Solutions repairs Ebara turbomolecular pumps, including magnetic levitation models used on semiconductor tools. Send the model and serial number and we'll confirm the repair before you ship.
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These are the Ebara model families we see most often. Don't see yours? Send the model from the nameplate.
| Model family | Bearing | Examples and notes |
|---|---|---|
| ET series | See nameplate | For example ET-600WS |
| EMT series | See nameplate | For example EMT390 |
| EBT series | See nameplate | Compact turbo pumps |
Ebara controllers and power supplies are repaired and matched to the pump. See controller repair.
Request a quote with the manufacturer, model, serial and part number so we can check its history and parts.
Send the pump, and the controller and cable if you have them, so we can test and tune them together.
We find what failed and why, then confirm the repair scope with you before work starts.
Standard or major service, bearing and rotor work and controller tuning, documented step by step.
Your pump ships back covered against part defects and workmanship for 12 months.
Brand names identify the equipment we service. Trotec Solutions is an independent repair company and is not affiliated with or authorized by these manufacturers.
Other brands: Edwards / Seiko Seiki, Pfeiffer, Alcatel / Adixen, Leybold, Shimadzu, Osaka, Mitsubishi.
Yes. We repair current and legacy Ebara turbo pumps. Send the model and serial number and we'll confirm before you ship.
Yes, when you can. Testing the pump, controller and cable together is how most levitation and spin-up faults get traced, and it lets us tune the set.
No. Trotec Solutions is an independent repair company, not affiliated with or authorized by the manufacturer. Every repair is backed by our own 12-month warranty.
Send the model and serial number, and the controller model if you have it.